Equipment
Spin Coater (스핀 코터)
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A device that is used to form a thin film on a substrate.
The device throughly coats the entire surface through rotation at a constant speed.
The device throughly coats the entire surface through rotation at a constant speed.
- Spin speed range: 300 - 7000 rpm (w/o error less than 3%)
- Maximum number of recipes: 50 steps, 50 recipies
- Maximum substrate size: 4 inch
- Maximum number of recipes: 50 steps, 50 recipies
- Maximum substrate size: 4 inch
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